• RecordNumber
    23713
  • Title

    Multicomponent and multilayered thin films for advanced microtechnologies : techniques, fundamentals, and devices

  • Author Statement
    edited by Orlando Auciello and Jurgen Engemann
  • Publication
    Kluwer Academic
  • Publication Year
    1993
  • Collation
    xv, 633 p. : ill. ; 25 cm
  • Series
    NATO ASI series. Series E, Applied sciences, vol. 234
  • Notes
    0792322657 , Includes bibliographical references and index , Proceeding of the NATO Advanced Study Institute on Multicomponent and Multilayered Thin Films for Advanced Microtechnologies Bad Windsheim, Germany Se , Published in cooperation with NATO Scientific Affairs Division
  • Subject

    Thin films , Thin film devices

  • ADDED ENTRIES
    Engemann, Jurgen , Auciello, Orlando , , ,
  • LC Class
    TK
  • LC Number
    7872
  • LC CutterNumber
    .T55N38
  • LC Date
    1992
    • Link To Document
    https://dl.iust.ac.ir/dl/search/default.aspx?Term=23713&Field=0&DTC=2