• RecordNumber
    24454
  • Title

    Introduction to VLSI process engineering

  • Author Statement
    edited by the Society of Chemical Engineers of Japan ; (editor in chief, Yuji Naka)
  • Edition
    English language ed
  • Publication
    Chapman & Hall
  • Publication Year
    1993
  • Collation
    xiii, 210 p. : ill. ; 24 cm
  • Notes
    0412395509 , Includes bibliographical references (p. (201)-204) and index , The English language edition has been translated from the original Japanese publication ... --T.p. verso
  • Subject

    Manufacturing processes , Integrated circuits - Very large scale integration

  • ADDED ENTRIES
    Naka, Yuji , ,
  • LC Class
    TK
  • LC Number
    7874
  • LC CutterNumber
    .I5957
  • LC Date
    1993
  • نام فايل
    IUST eb-117 -- eb117d15
    • Link To Document
    https://dl.iust.ac.ir/dl/search/default.aspx?Term=24454&Field=0&DTC=2