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RecordNumber
24476
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Author
Bednar, B. , Bednar, B.
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Title
Resists in microlithography and printing
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Author Statement
Bohumil Bednar, Jaroslav Kralicek, and Jaromir Zachoval ; with contributions by Andrey V. Yelcov and
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Edition
2nd rev. ed
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Publication
Elsevier , Elsevier
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Publication Year
1993
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Collation
376 p. : ill. ; 25 cm
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Series
Materials science monographs, 76
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Notes
0444988467 , Includes bibliographical references and index , Translation of: Litograficke techniky
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Subject
Lithography, Electron beam , X-ray lithography , Microlithography , Integrated circuits - Very large scale integration , Semiconductors
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ADDED ENTRIES
Zachoval, Jaromir. , Kralicek, Jaroslav. , ,
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LC Class
TK
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LC Number
7871.85
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LC CutterNumber
.B3753
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LC Date
1993
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Link To Document :
