RecordNumber
25115
Title
The Physics and chemistry of SiO2 and the Si-SiO2 interface 2
Author Statement
edited by C. Robert Helms and Bruce E. Deal
Publication
Plenum Press
Publication Year
1993
Collation
xvi, 503 p. : ill. ; 26 cm
Notes
0306444194 , Includes bibliographical references and indexes , Proceedings of the Second Symposium on the Physics and Chemistry of the SiO2 and Si-SiO2 Interface, held May 18-21, 1992, in St. Louis, Missouri, spon
Subject
Surfaces (Technology) , Surface chemistry , Silicon dioxide films , Dielectrics - Surfaces , Silica - Surfaces
ADDED ENTRIES
Deal, Bruce E. , Helms, C. Robert. , , ,
LC Class
QC
LC Number
585.75
LC CutterNumber
.S55P48
LC Date
1993