• RecordNumber
    25115
  • Title

    The Physics and chemistry of SiO2 and the Si-SiO2 interface 2

  • Author Statement
    edited by C. Robert Helms and Bruce E. Deal
  • Publication
    Plenum Press
  • Publication Year
    1993
  • Collation
    xvi, 503 p. : ill. ; 26 cm
  • Notes
    0306444194 , Includes bibliographical references and indexes , Proceedings of the Second Symposium on the Physics and Chemistry of the SiO2 and Si-SiO2 Interface, held May 18-21, 1992, in St. Louis, Missouri, spon
  • Subject

    Surfaces (Technology) , Surface chemistry , Silicon dioxide films , Dielectrics - Surfaces , Silica - Surfaces

  • ADDED ENTRIES
    Deal, Bruce E. , Helms, C. Robert. , , ,
  • LC Class
    QC
  • LC Number
    585.75
  • LC CutterNumber
    .S55P48
  • LC Date
    1993