Micro mechanical systems: principles and technology

Author Statement

edited by T. Fukuda and W. Menz

Publication

Elsevier Science

Publication Year

1998

Collation

viii, 268P., illus

Series

Handbook of sensors and actuators; v.6

Notes

0444823638 , Includes bibliographical references

Subject

Microelectromechanical systems

ADDED ENTRIES

Menz, Wolfgang , Fukuda, Toshio 1948 ed ,

LC Class

LC Number

163

LC CutterNumber

.M48

LC Date

1998

وارد کنندة اطلاعات

محمدزاده

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