RecordNumber
29602
Author
Hsu, Tai-Ran
Title
MEMS and microsystems : design and manufacture
Author Statement
Tai-Ran Hsu
Publication
McGraw-Hill
Publication Year
2002
Collation
xii, 436 p. : ill. ; 24 cm
Notes
Includes bibliographical references (p. 427-431) and index , 0072393912
Subject
Microelectronics , Microelectromechanical systems , Microelectronic packaging
LC Class
TK
LC Number
7874
LC CutterNumber
.H794
LC Date
2002
وارد کنندة اطلاعات
فراهاني