Micro process engineering : fundamentals, devices, fabrication, and applications

Author Statement

volume editor : Norbert Kockmann

Publication

Wiley-Vch

Publication Year

2006

Collation

xxii, 507 p. : illus

Series

Advanced micro & nanosystems

Notes

3527312463 , Includes bibliographical references and index

Subject

Production engineering , Microtechnology

ADDED ENTRIES

Kockmann, Norbert

LC Class

LC Number

183

LC CutterNumber

.M52

LC Date

2006

وارد کنندة اطلاعات

داوري

Link To Document