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RecordNumber
33455
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Title
Sputtering by particle bombardment
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Author Statement
edited by R. Behrisch; with conteributions by H. H. Andersen...[et al.]
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Publication
Springer-Verlag
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Publication Year
1981-
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Collation
3V., illus
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Series
Topics in applied physics; V.47, 52, 64
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Notes
3540534288 , V.1. Physical sputtering of single-element solids-- V.2.Sputtering of alloys and copmounds, electron and neutron sputtering, surface topography--3.Cha
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Subject
Surfaces (Physics) - Effect of radiation on , Solids - Effect of radiation on , Sputtering (Physics)
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ADDED ENTRIES
Andersen, Hans Henrik , Behrisch, Rainer ,
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LC Class
QC
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LC Number
176.8
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LC CutterNumber
.S72S68
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وارد کنندة اطلاعات
حسيني
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Link To Document :
