RecordNumber
33455
Title
Sputtering by particle bombardment
Author Statement
edited by R. Behrisch; with conteributions by H. H. Andersen...[et al.]
Publication
Springer-Verlag
Publication Year
1981-
Collation
3V., illus
Series
Topics in applied physics; V.47, 52, 64
Notes
3540534288 , V.1. Physical sputtering of single-element solids-- V.2.Sputtering of alloys and copmounds, electron and neutron sputtering, surface topography--3.Cha
Subject
Surfaces (Physics) - Effect of radiation on , Solids - Effect of radiation on , Sputtering (Physics)
ADDED ENTRIES
Andersen, Hans Henrik , Behrisch, Rainer ,
LC Class
QC
LC Number
176.8
LC CutterNumber
.S72S68
وارد کنندة اطلاعات
حسيني