RecordNumber
33623
Author
Lieberman, M. A. ( Michael A.) , Lieberman, M. A. ( Michael A.)
Title
Principles of plasma discharges and materials processing
Author Statement
Michael A. Lieberman, Allan J. Lichtenberg
Publication
Wiley , Wiley
Publication Year
1994
Collation
xxvi, 572 p. : ill. ; 25 cm
Notes
Includes bibliographical references (p. 559-564) and index , A Wiley-Interscience publication.
Subject
Plasma dynamics , Thin films -- Surfaces , Plasma etching , Plasma chemistry
ADDED ENTRIES
Lichtenberg, Allan J. ,
LC Class
QC
LC Number
718.5
LC CutterNumber
.D9L54
LC Date
1994
وارد کنندة اطلاعات
كيهاني فر