MOEMS micro-opto-electro-mechanical systems

SubTitle

micro-opto-electro-mechanical systems

Author Statement

Manouchehr E. Motamedi, editor.

Publication

SPIE Press

Publication Year

c2005

Collation

xxi, 614 p. ill. 26 cm

Notes

Includes bibliographical references and index , 9788122428339

Subject

Microelectromechanical systems. , Optoelectronic devices. , Microfabrication.

ADDED ENTRIES

Motamedi, M. Edward.

LC Class

LC Number

7875

LC CutterNumber

.M56

LC Date

2005

وارد کنندة اطلاعات

JALALIFAR

تاريخ ورود اطلاعات

1389/3/1

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