Notes
Includes bibliographical references and index , Machine generated contents note: 1. Introduction S. Lucyszyn; 2. Electromechanical modelling of electrostatic actuators D. Elata and V. Leus; 3. Switches and their fabrication technologies T. Lisec; 4. Niche switch technologies S. Lucyszyn, S. Pranonsatit, J. Y. Choi and A. Holmes; 5. Reliability I. De Wolf; 6. Dielectric charging G. Papaioannou; 7. Stress and thermal characterisation R. Y. Fillit and R. Fortunier; 8. High power handling F. Coccetti and R. Plana; 9. Packaging H. Tilmans, A. Jourdain and P. De Moor , 9780521897716
