• RecordNumber
    41376
  • Title

    Micromechanics and MEMS : classic and seminal papers to 1990

  • Author Statement
    edited by William S. Trimmer
  • Publication
    IEEE Press
  • Publication Year
    1997
  • Collation
    xv, 701 p. ill
  • Notes
    "A selected reprint volume." , Includes bibliographical references and index , 0780310853
  • Subject

    Microelectronics. , Microelectromechanical systems. , Actuators.

  • ADDED ENTRIES
    AU Trimmer, W , AU Institute of Electrical and Electronics Engineers
  • LC Class
    TK
  • LC Number
    7874
  • LC CutterNumber
    .M4876
  • LC Date
    1997
  • نام فايل
    B629D7 -- IUST B629
    • Link To Document
    https://dl.iust.ac.ir/dl/search/default.aspx?Term=41376&Field=0&DTC=2