RecordNumber
42830
Title
Proceedings, IEEE, the thirteenth annual International Conference on Micro Electro Mechanical Systems : MEMS 2000 : Miyazaki, Japan, January 23-27, 2000
SubTitle
MEMS 2000 : Miyazaki, Japan, January 23-27, 2000
Author Statement
sponsored by the IEEE Robotics and Automation Society in cooperation with the Micromachine Center Thirteenth annual International Conference on Micro Electro Mechanical systems , MEMS 2000 , 2000 IEEE Micro Electro Mechanical Systems , Micro Electro Mechanical Systems
Publication
Piscataway N.J. Institute of Electrical and Electronics Engineers
Publication Year
2000
Collation
xlv, 810 p. : illus
Notes
"IEEE Catalog Number: 00CH36308" , Includes bibliographical references and index
Subject
Microelectromechanical systems
ADDED ENTRIES
IEEE Robotics and Automation Society. , Micromachine Center (Japan)
LC Class
TK
LC Number
7875
LC CutterNumber
.I33
LC Date
2000