• RecordNumber
    42830
  • Title

    Proceedings, IEEE, the thirteenth annual International Conference on Micro Electro Mechanical Systems : MEMS 2000 : Miyazaki, Japan, January 23-27, 2000

  • SubTitle
    MEMS 2000 : Miyazaki, Japan, January 23-27, 2000
  • Author Statement
    sponsored by the IEEE Robotics and Automation Society in cooperation with the Micromachine Center Thirteenth annual International Conference on Micro Electro Mechanical systems , MEMS 2000 , 2000 IEEE Micro Electro Mechanical Systems , Micro Electro Mechanical Systems
  • Publication
    Piscataway N.J. Institute of Electrical and Electronics Engineers
  • Publication Year
    2000
  • Collation
    xlv, 810 p. : illus
  • Notes
    "IEEE Catalog Number: 00CH36308" , Includes bibliographical references and index
  • Subject

    Microelectromechanical systems

  • ADDED ENTRIES
    IEEE Robotics and Automation Society. , Micromachine Center (Japan)
  • LC Class
    TK
  • LC Number
    7875
  • LC CutterNumber
    .I33
  • LC Date
    2000