RecordNumber
42944
Author
Menz, W (Wolfgang)
Title
Microsystem technology
Author Statement
W. Menz, J. Mohr, O. Paul.
Publication
Weinheim New York Wiley-VCH
Publication Year
2001
Collation
xii, 500 p. : illus
Notes
Includes bibliographical references (p. [465]-483) and index. , 3527296344
Subject
Microelectronics
ADDED ENTRIES
AU Mohr, J (J�urgen) , AU Paul, Oliver , TI
LC Class
TK
LC Number
7874
LC CutterNumber
.M436
LC Date
2001