• RecordNumber
    42944
  • Author

    Menz, W (Wolfgang)

  • Title

    Microsystem technology

  • Author Statement
    W. Menz, J. Mohr, O. Paul.
  • Publication
    Weinheim New York Wiley-VCH
  • Publication Year
    2001
  • Collation
    xii, 500 p. : illus
  • Notes
    Includes bibliographical references (p. [465]-483) and index. , 3527296344
  • Subject

    Microelectronics

  • ADDED ENTRIES
    AU Mohr, J (J�urgen) , AU Paul, Oliver , TI
  • LC Class
    TK
  • LC Number
    7874
  • LC CutterNumber
    .M436
  • LC Date
    2001