RecordNumber
4914
Author
Kamins, Theodore I.
Title
Polycrystalline silicon for integrated circuit applications
Author Statement
By Ted Kamins
Publication
Kluwer Academic
Publication Year
1991, C. 1988
Collation
Xii, 290P., illus., diagr., tables
Series
Kluwer international series in engineering and computer science
Notes
Bibliography: P. 249-280 , 0898382599
Subject
Silicon-Electric properties , Integrated circuits
LC Class
TK
LC Number
7871.15
LC CutterNumber
.S55K36