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RecordNumber
4914
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Author
Kamins, Theodore I.
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Title
Polycrystalline silicon for integrated circuit applications
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Author Statement
By Ted Kamins
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Publication
Kluwer Academic
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Publication Year
1991, C. 1988
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Collation
Xii, 290P., illus., diagr., tables
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Series
Kluwer international series in engineering and computer science
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Notes
Bibliography: P. 249-280 , 0898382599
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Subject
Silicon-Electric properties , Integrated circuits
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LC Class
TK
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LC Number
7871.15
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LC CutterNumber
.S55K36
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Link To Document :
