• RecordNumber
    4922
  • Author

    Moreau, Wayne M

  • Title

    Semiconductor lithography : principles, practices, and materials

  • Author Statement
    Wayne M. Moreau
  • Publication
    Plenum Press
  • Publication Year
    1991, C.1988
  • Collation
    xx, 931 p. : ill. ; 26 cm
  • Series
    Microdevices
  • Notes
    0306421852 , Includes bibliographies and index
  • Subject

    Photoresists , Microlithography , Semiconductors

  • LC Class
    TK
  • LC Number
    7871.85
  • LC CutterNumber
    .M583
  • LC Date
    1988
    • Link To Document
    https://dl.iust.ac.ir/dl/search/default.aspx?Term=4922&Field=0&DTC=2