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RecordNumber
5408
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Author
Sivaram, S.
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Title
Chemical Vapor deposition: thermal and plasma deposition of electronic materials
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Author Statement
S. Sivaram
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Publication
Van Nostrand Reinhold
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Publication Year
1995
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Collation
xii, 292P., illus
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Notes
0442010796 , Includes bibliographical references
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Subject
Microelectronics , Chemical Vapor deposition , Microelectronics industry
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LC Class
TK
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LC Number
7836
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LC CutterNumber
.S54
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LC Date
1995
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Link To Document :
