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RecordNumber
56604
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Title
MEMS : design and fabrication
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SubTitle
design and fabrication
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Author Statement
edited by Mohamed Gad-el-Hak
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Edition
2nd ed
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Publication
Boca Raton, FL CRC/Taylor & Francis
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Publication Year
2006
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Collation
1 v. (various pagings) : illus
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Series
Mechanical engineering series , The MEMS handbook
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Notes
0849391385 , One of three parts whose previous edition was a published as a single volume , Includes bibliographical references and index
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Subject
Microelectromechanical systems , Microfabrication
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ADDED ENTRIES
AU Gad-el-Hak, Mohamed, 1945- , TI Mechanical engineering series (Boca Raton, Fla.)
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LC Class
TK
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LC Number
7875
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LC CutterNumber
.M444
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LC Date
2006
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نام فايل
B479D12
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Link To Document :