MEMS : design and fabrication

SubTitle

design and fabrication

Author Statement

edited by Mohamed Gad-el-Hak

Edition

2nd ed

Publication

Boca Raton, FL CRC/Taylor & Francis

Publication Year

2006

Collation

1 v. (various pagings) : illus

Series

Mechanical engineering series , The MEMS handbook

Notes

0849391385 , One of three parts whose previous edition was a published as a single volume , Includes bibliographical references and index

Subject

Microelectromechanical systems , Microfabrication

ADDED ENTRIES

AU Gad-el-Hak, Mohamed, 1945- , TI Mechanical engineering series (Boca Raton, Fla.)

LC Class

LC Number

7875

LC CutterNumber

.M444

LC Date

2006

نام فايل

B479D12

Link To Document