• RecordNumber
    57709
  • Author

    Madou, Marc J

  • Title

    Fundamentals of microfabrication and nanotechnology

  • Author Statement
    Marc J. Madou. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology
  • Edition
    3rd ed
  • Publication
    CRC Press Boca Raton, FL
  • Publication Year
    2012
  • Collation
    3 v. : ill. (some col.)
  • Notes
    Includes bibliographical references and index , v. 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology -- v. 2. Manufacturing techniques for microfabrication and nanotechnology -- v. 3. From MEMS to Bio-MEMS and Bio-Nems, Manufacturaing techniques and applications.
  • Subject

    Microelectromechanical systems , Nanoelectromechanical systems , Microfluidics , Solid-state physics

  • ADDED ENTRIES
    TI
  • LC Class
    TK
  • LC Number
    7875
  • LC CutterNumber
    .M33
  • LC Date
    2012
  • نام فايل
    B722D3
    • Link To Document
    https://dl.iust.ac.ir/dl/search/default.aspx?Term=57709&Field=0&DTC=2