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RecordNumber
58994
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Author
Bhattacharyya, Bijoy
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Title
Electrochemical micromachining for nanofabrication, MEMS and nanotechnology
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Author Statement
Bijoy Bhattacharyya, Production Engineering Department, Jadavpur University, Kolkata, India
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Publication
William Andrew Oxford, UK Waltham, MA
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Publication Year
2015
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Collation
xxv, 270 p. : ill
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Series
Micro & nano technologies
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Notes
Includes bibliographical references and index , 9780323327374
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Subject
Micromachining , Nanotechnology , Microelectromechanical systems , Microelectromechanical systems , Micromachining , Nanotechnology
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ADDED ENTRIES
SE Micro & nano technologies , TI
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LC Class
TJ
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LC Number
1191.5
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LC CutterNumber
.B43
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LC Date
2015
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Link To Document :