RecordNumber
58994
Author
Bhattacharyya, Bijoy
Title
Electrochemical micromachining for nanofabrication, MEMS and nanotechnology
Author Statement
Bijoy Bhattacharyya, Production Engineering Department, Jadavpur University, Kolkata, India
Publication
William Andrew Oxford, UK Waltham, MA
Publication Year
2015
Collation
xxv, 270 p. : ill
Series
Micro & nano technologies
Notes
Includes bibliographical references and index , 9780323327374
Subject
Micromachining , Nanotechnology , Microelectromechanical systems , Microelectromechanical systems , Micromachining , Nanotechnology
ADDED ENTRIES
SE Micro & nano technologies , TI
LC Class
TJ
LC Number
1191.5
LC CutterNumber
.B43
LC Date
2015