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RecordNumber
6339
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Author
Sugawara, M. (Minoru)
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Title
Plasma etching: fundamentals and applications
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Author Statement
M. Sugawara; with contribution from Barry L. Stansfield,...[et al.]
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Publication
Oxford University press
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Publication Year
1998
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Collation
viii, 347P., illus, tables
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Series
Series on semiconductor science and technology; 7
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Notes
019856287x , Includes bibliographical references
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Subject
Plasma etching , Semiconductors - Etching
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ADDED ENTRIES
Stansfield, Barry L. , ,
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LC Class
TK
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LC Number
7871.85
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LC CutterNumber
.S88
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LC Date
1998
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نام فايل
B630D17 -- IUST B630
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Link To Document :
