• RecordNumber
    6339
  • Author

    Sugawara, M. (Minoru)

  • Title

    Plasma etching: fundamentals and applications

  • Author Statement
    M. Sugawara; with contribution from Barry L. Stansfield,...[et al.]
  • Publication
    Oxford University press
  • Publication Year
    1998
  • Collation
    viii, 347P., illus, tables
  • Series
    Series on semiconductor science and technology; 7
  • Notes
    019856287x , Includes bibliographical references
  • Subject

    Plasma etching , Semiconductors - Etching

  • ADDED ENTRIES
    Stansfield, Barry L. , ,
  • LC Class
    TK
  • LC Number
    7871.85
  • LC CutterNumber
    .S88
  • LC Date
    1998
  • نام فايل
    B630D17 -- IUST B630
    • Link To Document
    https://dl.iust.ac.ir/dl/search/default.aspx?Term=6339&Field=0&DTC=2