• RecordNumber
    6750
  • Author

    Graff, Klaus

  • Title

    Metal impurities in silicon-device fabrication

  • Author Statement
    Klaus Graff
  • Edition
    2nd. rev. ed
  • Publication
    Springer
  • Publication Year
    2000
  • Collation
    xv, 268 P., illus., tables
  • Series
    Springer series in materials science; 24
  • Notes
    3540642137 , Bibliography: P. 246-266
  • Subject

    Contamination (Technology) , Silicon , Silicon - Inclusions , Semiconductors

  • ADDED ENTRIES
    ,
  • LC Class
    TK
  • LC Number
    7871.852
  • LC CutterNumber
    .G73
  • LC Date
    2000
  • وارد کنندة اطلاعات
    صادقي
    • Link To Document
    https://dl.iust.ac.ir/dl/search/default.aspx?Term=6750&Field=0&DTC=2