RecordNumber
7342
Author
Lieberman, M. A.
Title
Principles of plasma discharges and materials processing
Author Statement
Michael A. Lieberman, Allan J. Lichtenberg
Edition
2nd ed
Publication
Wiley
Publication Year
2005
Collation
xxxv, 757 p.: illus
Notes
Includes bibliographical references (p. 735-748) , 0471720011
Subject
Plasma dynamics. , Thin films -- Surfaces , Plasma chemistry -- Industrial applications
ADDED ENTRIES
Lichtenberg, Allan J ,
LC Class
QC
LC Number
718.5
LC CutterNumber
.D9L54
LC Date
2005
وارد کنندة اطلاعات
داوري