• RecordNumber
    7342
  • Author

    Lieberman, M. A.

  • Title

    Principles of plasma discharges and materials processing

  • Author Statement
    Michael A. Lieberman, Allan J. Lichtenberg
  • Edition
    2nd ed
  • Publication
    Wiley
  • Publication Year
    2005
  • Collation
    xxxv, 757 p.: illus
  • Notes
    Includes bibliographical references (p. 735-748) , 0471720011
  • Subject

    Plasma dynamics. , Thin films -- Surfaces , Plasma chemistry -- Industrial applications

  • ADDED ENTRIES
    Lichtenberg, Allan J ,
  • LC Class
    QC
  • LC Number
    718.5
  • LC CutterNumber
    .D9L54
  • LC Date
    2005
  • وارد کنندة اطلاعات
    داوري