چكيده به لاتين
Surface topography is stated as determination of surface local deviations comparing to a completely flat one. In recent decades regarding the advance of new technologies lie high speed computers and solid state devices and necessity of accurate analysis of tiny surfaces applicable in engineering fields, surfaces topography has been developed respectively.
Instruments of surface topography measurement is categorized in two groups of optic and non-optic models. Non-optic instruments measure surface roughness through direct contact while it can be done without any contact via optic models. Non-contact feature of optic measurement avoid damaging the surface.
One of optic instruments for measuring surface roughness is interferometer. In order to utilize interferometer for surface topography one interferometery arrangement and a analysis technique is required to analyze interferences and convert them into surface information to simulate specimen surface.
One of the most applicable arrangement is Fizeau interferometery which is utilized for obtaining a domain larger than the specimen.
In this thesis some identical test surfaces has been analyzed via Zemax software. For investigating these surfaces, wave-fronts reflected from test surface and reference (Ideal) surface has been evaluated in interferometery arrangement through phase shifting method.
Based on this survey, utilizing phase shifting method, more accurate results will be obtained in jagged surfaces rather than curved surfaces. In curved surfaces measurement accuracy decreases by increasing curvature diameter respectively. Off course these results are observed in Zemax software and taking into account other software or practical analysis the results may be different.
Keywords: Surface topography, interferometery, Fizeau, Zemax, phase shifting interferometery
