چكيده به لاتين
Thin film of transition metal nitride deposited by means of magnetron sputtering is widely used for industrial and medical applications due to mechanical and chemical properties such as high hardness, good abrasion and scratch resistance, high temperature stability, high oxidation resistance and corrosion resistance. ZrN thin film is attracted more interest due to its very good physical, mechanical and chemical properties compared to transition metal nitride such as titanium nitride, chromium nitride. Sputtered ZrN coating exhibits greater hardness and wear and corrosion resistance, lower friction coefficient, brighter gold color properties compared to its rival TiN films.
In recent decades, ternary coatings have been widely interested for better mechanical and tribological properties than binary coatings. Aluminum metal is one of the elements added to the zirconium nitride coating to improve mechanical and tribological properties and high temperature oxidation resistance. also , Different deposition parameters are effective on coating mechanical properties such as substrate bias voltage and amount of the third element. Therefore, first in this study, the optimal ZrN coating was obtained by changing the bias voltage. Then, the effect of the amount of aluminum in the Zr1-xAlxN coatings was investigated on the structure and morphology and mechanical and tribological and oxidation properties. Zr1-xAlxN coatings were deposited at a pressure of 10 mtorr and the ratio of the flow rate of nitrogen to the total rate was 10% and the 100 V bias voltage. The amount of aluminum in coatings varied from 0 to 160 watts by changing the aluminum target power. Then, the structure, morphology and phases of the coatings were investigated with XRD and FESEM. The hardness and elastic modulus of the coatings were investigated with the nanohardness machine and wear resistance and the coefficient of friction of the coatings were investigated with a pin-on-disc wear test machine. Also, to determine the oxidation resistance of the coatings, they were kept at 700 °C for two hours, then the oxidation resistance was investigated by XRD. The results showed Zr0.52Al0.48N coating in 100 V voltage bias has the highest hardness and wear resistance and oxidation resistance the lowest coefficient of friction.
