چكيده به لاتين
In this study, TiCrN thin films are deposited on 304 steel substrates by co-sputtering method, employing two seprate targets of Ti and Cr and introducing various flows of netrogen into the chamber. Then, Energy-dispersive X-ray spectroscopy (EDS) is utilized for analyzing the chemical composition; nanoindatation test is used for measuring the hardness of the thin films; and Atomic force microscopy (AFM) analisis is carried out to investigate the residual impression on the surface. Finally, it was found that increasing nitrogen flow and, consequently, increasing nitrogen content in the TiCrN thin films leads to an increase in their hardness.
Keywords: TiCrN, magnetron sputtering, hardness, EDS, nanoindentation, AFM
