چكيده به لاتين
In the present study, the main purpose was the fabrication and characterization of pure tin oxide (SnO2) and Fluorine doped Tin Oxide (FTO) thin layer by spray pyrolysis technique, which is one of the transparent conducting oxides (TCO) and is used as a transparent electrode in solar cells electrodes. For the deposition of these films, Tin(IV) chloride pentahydrate (SnCl4.5H2O) and ammonium fluoride (NH4F) were used as Sn and F precursor with F / Sn ratio equal to 0, 10, 15, 20, 25, and 30% by weight percent. Also, nickel and cobalt cationic dopants were added to the FTO film using their chloride in Ni / Sn and Co / Sn ratios in the range of 0 to 4 wt%, and their effects on the film properties were investigated. The deposition temperature varied in the range of 400 to 500°C and the effect of these changes were investigated.
Structural, morphological, optical and electrical studies of the films were performed by X-ray diffraction (XRD) analysis, field emission electron microscopy (FE-SEM), visible spectrophotometry and four-point measurement. In this study, completely dense films with uniform thickness were deposited. Depending on the amount of dopants used in the solution as well as the deposition temperature, the amount of optical transmission and electrical resistance of the films varied. The highest transmission in the visible region was observed in the pure tin oxide sample which was about 84% and the lowest sheet resistance was 6.8 Ω/□ which was related to the sample with 20% by weight of fluorine, 2% by weight of cobalt and nickel which is deposited at 500℃, and the optical transmission in the visible region of this sample was about 75%, which make this film a suitable option as a transparent conductive electrode in solar cells.
Keywords:
Thin Film, Transparent Conductive Oxide, FTO, Spray pyrolysis
